JPS639721B2 - - Google Patents
Info
- Publication number
- JPS639721B2 JPS639721B2 JP56156650A JP15665081A JPS639721B2 JP S639721 B2 JPS639721 B2 JP S639721B2 JP 56156650 A JP56156650 A JP 56156650A JP 15665081 A JP15665081 A JP 15665081A JP S639721 B2 JPS639721 B2 JP S639721B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- humidity sensor
- humidity
- conductivity
- current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Non-Adjustable Resistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56156650A JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56156650A JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5857702A JPS5857702A (ja) | 1983-04-06 |
| JPS639721B2 true JPS639721B2 (en]) | 1988-03-01 |
Family
ID=15632287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56156650A Granted JPS5857702A (ja) | 1981-09-30 | 1981-09-30 | 湿度センサ− |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5857702A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60211347A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
| JPS60211348A (ja) * | 1984-04-06 | 1985-10-23 | Matsushita Electric Ind Co Ltd | 水素ガスセンサ− |
-
1981
- 1981-09-30 JP JP56156650A patent/JPS5857702A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5857702A (ja) | 1983-04-06 |
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